B81C 99/003
Characterising mems devices
Official title: {Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants}
B81C99/003 (Characterising mems devices) appears on 58 US grants and 70 published applications in this corpus.
Search patents in B81C- Granted patents
- 58
- Published applications
- 70
- Assignees
- 47
- Inventors
- 167
- Latest grant
- 13 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2006 | 0 | 1 |
| 2007 | 0 | 1 |
| 2008 | 0 | 1 |
| 2009 | 2 | 3 |
| 2010 | 0 | 3 |
| 2011 | 1 | 3 |
| 2012 | 2 | 5 |
| 2013 | 4 | 4 |
| 2014 | 2 | 4 |
| 2015 | 4 | 12 |
| 2016 | 8 | 4 |
| 2017 | 4 | 4 |
| 2018 | 7 | 4 |
| 2019 | 7 | 6 |
| 2020 | 4 | 2 |
| 2021 | 4 | 1 |
| 2022 | 1 | 3 |
| 2023 | 1 | 2 |
| 2024 | 4 | 3 |
| 2025 | 2 | 1 |
| 2026 | 1 | 3 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Method and device for ascertaining dynamic parameters of a MEMS apparatus, and MEMS apparatus13 Jan 2026US 12,522,499 B2Robert Bosch GmbH
- Method and apparatus for evaluating electrostatic or nonlinear devices4 Nov 2025US 12,459,809 B2The Board of Trustees of the Leland Stanford Junior University
- Method and a system for characterising structures through a substrate14 Oct 2025US 12,444,039 B2Unity Semiconductor Corporation
- Systems and methods for thermally regulating sensor operation3 Sep 2024US 12,078,653 B2Sz Dji Technology Co., Ltd.
- Method and a system for characterising structures through a substrate3 Sep 2024US 12,079,979 B2Unity Semiconductor Corporation
- Mems device and method for characterizing a mems device11 Jun 2026US 2026/0159372 A1Infineon Technologies AG
- Packaged mems device having a humidity sensor12 Feb 2026US 2026/0042662 A1STMicroelectronics International N. V.
- Method and apparatus for evaluating electrostatic or nonlinear devices5 Feb 2026US 2026/0035235 A1The Board of Trustees of the Leland Stanford Junior University
- Micro-assembler system with micro-object trap locations12 Jun 2025US 2025/0187909 A1Xerox Corporation
- Method and a system for characterising structures through a substrate22 Aug 2024US 2024/0281955 A1Unity Semiconductor Corporation
Most cited
By later US patents
- System and method of sensing actuation and release voltages of an interferometric modulator19US 7,551,159 B2Idc, LLC · 2009
- Internally generated DFT stepped hysteresis sweep for electrostatic MEMS7US 10,029,914 B2Cavendish Kinetics, Inc. · 2018
- Microsystem manipulation apparatus6US 7,635,844 B2Touchstone Research Laboratory, Ltd. · 2009
- Methods, apparatus, and systems for fabrication of polymeric nano- and micro-fibers in aligned configurations5US 9,029,149 B2Carnegie Mellon University · 2015
- System and method of sensing actuation and release voltages of an interferometric modulator3US 8,207,920 B2QUALCOMM MEMS Technologies, Inc. · 2012