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US 10,029,914 B2Granted
Internally generated DFT stepped hysteresis sweep for electrostatic MEMS
AssigneeCavendish Kinetics, Inc.
InventorsJames Douglas Huffman, Cong Quoc Khieu, Robertus Petrus Van Kampen, Karl F. Smayling, Vikram Joshi
Life of this patent
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Abstract
The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder.
Claims22
A MEMS DVC, comprising:
- at least one MEMS device, the MEMS device comprising a movable plate, an RF electrode, one or more pull-down electrodes and one or more pull-up electrodes;
- a first switch coupled to either the one or more pull-down electrodes of the MEMS device or the one or more pull-up electrodes of the MEMS device, wherein the first switch is additionally coupled to ground;
- a second switch coupled to either the one or more pull-down electrodes of the MEMS device or the one or more pull-up electrodes of the MEMS device;
- and
- a power management system coupled to the second switch, wherein the at least one MEMS device, the first switch, the second switch and the power management system are all disposed in a single package.
2 more elements
Dependencies are inferred from the claim text.