Microsystem manipulation apparatus
AssigneeTouchstone Research Laboratory, Ltd.
InventorsBrian E. Joseph, Elizabeth N. Kraftician, Thomas M. Matviya
Life of this patent
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Abstract
A microsystem manipulation apparatus and an associated kit is described that may be used to facilitate the assembly and testing of Microsystems and microsystem components. The microsystem manipulation apparatus may include a scanning electron microscope imaging system, a stage, and at least one manipulator having an associated tool. The microsystem manipulation apparatus may be partially or fully automated to provide for routine microsystem assembly, disasembly, and/or testing. The associated kit may include one or more manipulators and associated tools for retrofitting an existing scanning electron microscope to produce a microsystem manipulation apparatus.
Claims16
A microsystem manipulation apparatus, comprising:
- a scanning electron microscope;
- an operating chamber within which said scanning electron microscope operates;
- a first manipulator having an end within said operating chamber;
- a second manipulator having an end within said operating chamber;
- and
- a stage movable by a third manipulator and positioned within said operating chamber and near said first manipulator.
Dependencies are inferred from the claim text.