Back to results
US 12,522,499 B2Granted
Method and device for ascertaining dynamic parameters of a MEMS apparatus, and MEMS apparatus
AssigneeRobert Bosch GmbH
InventorJuergen Mueller
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeRobert Bosch GmbH
InventorJuergen Mueller
Estimating the term…
A method for ascertaining at least one dynamic parameter of a MEMS apparatus, which has at least one movable component, and the at least one dynamic parameter describes a dynamic property of the at least one movable component. A test signal which has at least one static excitation of constant amplitude is applied to the MEMS apparatus, and a response signal of the MEMS apparatus to the test signal is detected. At least one static parameter of the MEMS apparatus is ascertained by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, the at least one static parameter describing a geometric and/or structural property of the at least one movable component. The at least one dynamic parameter of the MEMS apparatus is calculated based on the ascertained at least one static parameter.
A method for ascertaining at least one dynamic parameter of a microelectromechanical (MEMS) apparatus, the MEMS apparatus having at least one movable component, and wherein the at least one dynamic parameter describes a dynamic property of the at least one movable component, the method comprising the following steps:
A device for ascertaining at least one dynamic parameter of a microelectromechanical (MEMS) apparatus, the MEMS apparatus including at least one movable component, and wherein the at least one dynamic parameter describes a dynamic property of the at least one movable component, the device comprising:
A system comprising:
Dependencies are inferred from the claim text.