Y10S 977/867
Scanning thermal probe
Y10S977/867 (Scanning thermal probe) appears on 29 US grants and 9 published applications in this corpus.
Search patents in Y10S- Granted patents
- 29
- Published applications
- 9
- Assignees
- 23
- Inventors
- 53
- Latest grant
- 1 Apr 2014
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 1 | 0 |
| 2001 | 6 | 3 |
| 2002 | 5 | 1 |
| 2003 | 3 | 1 |
| 2004 | 1 | 1 |
| 2005 | 1 | 1 |
| 2006 | 2 | 0 |
| 2007 | 0 | 1 |
| 2008 | 0 | 0 |
| 2009 | 1 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Method of making thin film probe tip for atomic force microscopy1 Apr 2014US 8,689,361 B1Oicmicro, LLC
- Thermal probe26 Nov 2013US 8,595,861 B2National Cheng Kung University
- Probe for scanning thermal microscope7 Apr 2009US 7,514,678 B2Hon Hai Precision Industry Co., Ltd.
- Dual stage instrument for scanning a specimen5 Sep 2006US 7,100,430 B2KLA-Tencor Corporation
- Heat emitting probe and heat emitting probe apparatus11 Jul 2006US 7,073,937 B2Daiken Chemical Co., Ltd.
- Thermal probe17 Jan 2013US 2013/0019352 A1National Cheng Kung University
- Probe for scanning thermal microscope19 Apr 2007US 2007/0085002 A1Hon Hai Precision Industry Co., Ltd.
- Dual stage instrument for scanning a specimen13 Jan 2005US 2005/0005688 A1KLA-Tencor Corporation
- Temperature measurement probe and temperature measurement apparatus12 Feb 2004US 2004/0028119 A1SII NanoTechnology Inc.
- Dual stage instrument for scanning a specimen15 May 2003US 2003/0089162 A1
Most cited
By later US patents
- Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen142US 5,441,343 ATopometrix · 1995
- Scanning thermal profiler117US 4,747,698 AInternational Business Machines Corporation · 1988
- Dual stage instrument for scanning a specimen87US 5,948,972 AKLA-Tencor Corporation · 1999
- Dual stage instrument for scanning a specimen85US 6,267,005 B1KLA-Tencor Corporation · 2001
- Cantilever and measuring apparatus using it67US 5,929,438 ANikon Corporation · 1999