Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen

A method for measuring a thermal parameter of a specimen with a scanning thermal probe microscope having a probe having a distal tip for maintaining thermal communication with surface contours along a surface of the specimen, and a thermal sensor in thermal communication with said probe for measuring said thermal parameter, comprising the steps of:

• maintaining said thermal sensor at a substantially constant temperature while maintaining a temperature differential between said thermal sensor and said specimen;
• maintaining the probe in thermal communication with said surface of said specimen;
• generating an electrical heat transfer signal proportional to power required to maintain said thermal sensor at said substantially constant temperature, providing an indication of heat transfer between said probe and said specimen;
• scanning said specimen relative to said probe and determining the position of said probe relative to said surface of said specimen;
• and
• storing said electrical heat transfer signal and said position of said probe relative to said surface of said specimen.