Method of making thin film probe tip for atomic force microscopy
AssigneeOicmicro, LLC
InventorSalleh Ismail
Life of this patent
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Abstract
A probe for atomic force microscopy may be provided by depositing a thin film onto a wafer substrate and etching the substrate to leave the thin film behind in the form of a handle, a cantilever, and a probe tip in the cantilever. In some embodiments, a thin film substrate for the probe may be accomplished by forming the probe mold on a first wafer, bonding a second wafer onto the first wafer, and patterning out the second wafer to define the substrate for the probe on the first wafer. The thin film may be deposited onto the exposed portions of the first wafer. Thereafter, portions of the first and second wafers may be removed to leave behind the probe.
Claims6
A method of producing a thin film probe for atomic force microscopy, comprising:
- etching a probe tip mold into a first wafer;
- bonding a second wafer over the first wafer while concealing the probe tip mold;
- etching away a portion of the second wafer exposing the probe tip mold;
- depositing a layer of thin film onto the second wafer and into the exposed probe tip mold, the thin film forming a substrate defining the probe to include a handle on the second wafer, a cantilever extending from the handle, and a probe tip;
- removing the first wafer;
- removing the thin film layer in a pattern leaving the substrate defining the probe intact;
- and
- removing the substrate defining the probe from a remainder of the second wafer.
Dependencies are inferred from the claim text.