US 4,747,698 A · Scanning thermal profiler

Abstract

Apparatus is provided for investigating surface structures irrespective of the materials involved. A fine scanning tip is heated to a steady state temperature at a location remote from the structure to be investigated. Thereupon, the scanning tip is moved to a position proximate to, but spaced from the structure. At the proximate position, the temperature variation from the steady state temperature is detected. The scanning tip is scanned across the surface sturcture with the aforesaid temperature variation maintained constant. Piezo electric drivers move the scanning tip both transversely of, and parallel to, the surface structure. Feedback control assures the proper transverse positioning of the scanning tip and voltages thereby generated replicate the surface structure to be investigated.

Claims21

Dependent claims

Apparatus for investigating surface structures present on the surface of a sample to be investigated irrespective of the materials involved comprising:

probe means including a fine scanning tip;
means for relatively positioning said scanning tip and the surface to be investigated;
a heat source for heating said scanning tip to a controlled temperature when said scanning tip is remote from the sample surface;
temperature sensing means at said scanning tip for detecting variations in the tip temperature when said scanning tip is moved to a separation distance in close proximity with the sample surface;
means for scanning said scanning tip across the sample surface in close proximity therewith;
means for automatically controlling the separation distance between said scanning tip and the sample surface in response to the temperature variations such that the temperature variations remain substantially constant during scanning;
and
means for graphically displaying the spatial coordinates of said scanning tip to produce a topographical map of the surface.

5 more elements

A method of investigating surface structures irrespective of the materials involved comprising the steps of:

applying heat to a scanning tip so that it achieves a steady state temperature when it is remote from the surface of a sample to be investigated;
moving the scanning tip transversely of the sample surface to a separation distance in close proximity therewith;
scanning the scanning tip across the sample surface;
sensing variations in temperature of the scanning tip from the steady state temperature as the scanning step proceeds;
automatically controlling the separation distance between the scanning tip and the sample surface in response to the temperature variations such that the temperature variations remain constant during the scanning step;
and
graphically displaying the spatial coordinates of the scanning tip to produce a topographical map of the sample surface.

4 more elements

Dependencies are inferred from the claim text.

Scanning thermal profiler

Life of this patent

Scanning thermal profiler

Life of this patent

Abstract

Claims21