Probe for scanning thermal microscope

Abstract

A probe for a scanning thermal microscope includes a cantilever beam, an insulating layer, a conductive layer and a carbon nanotube. The cantilever beam includes a microtip at a distal end thereof, and the microtip has a conductive exterior portion with a pointed part. The insulating layer is formed on a part of the conductive exterior portion other than the pointed part thereof. The conductive layer is formed on the insulating layer and has a coupling portion in contact with the pointed part of the conductive exterior portion of the microtip, the coupling portion of the conductive layer and the pointed part of the conductive exterior portion thereby cooperatively form a thermocouple junction. The carbon nanotube has one end arranged on the thermocouple junction. The probe for a scanning thermal microscope increases spatial resolution of scanning thermal microscope and can prevent excessive current leakage.

Dependencies are inferred from the claim text.