Y10S 977/85
Scanning probe control process
Y10S977/85 (Scanning probe control process) appears on 303 US grants and 90 published applications in this corpus.
Search patents in Y10S- Granted patents
- 303
- Published applications
- 90
- Assignees
- 113
- Inventors
- 439
- Latest grant
- 28 Sep 2021
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 2 | 0 |
| 1990 | 3 | 0 |
| 1991 | 5 | 0 |
| 1992 | 6 | 0 |
| 1993 | 12 | 0 |
| 1994 | 15 | 0 |
| 1995 | 26 | 0 |
| 1996 | 23 | 0 |
| 1997 | 15 | 0 |
| 1998 | 27 | 0 |
| 1999 | 22 | 0 |
| 2000 | 10 | 0 |
| 2001 | 25 | 7 |
| 2002 | 13 | 14 |
| 2003 | 14 | 10 |
| 2004 | 24 | 12 |
| 2005 | 11 | 12 |
| 2006 | 10 | 13 |
| 2007 | 6 | 6 |
| 2008 | 10 | 3 |
| 2009 | 7 | 7 |
| 2010 | 4 | 1 |
| 2011 | 8 | 2 |
| 2012 | 1 | 1 |
| 2013 | 1 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 1 | 0 |
| 2018 | 0 | 1 |
| 2019 | 0 | 0 |
| 2020 | 1 | 1 |
| 2021 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Scanning probe microscope for cleaning nanostructures28 Sep 2021US 11,130,159 B2International Business Machines Corporation
- Cleaning of nanostructures28 Jan 2020US 10,543,515 B2International Business Machines Corporation
- Cleaning of nanostructures11 Apr 2017US 9,616,470 B1International Business Machines Corporation
- Scanning probe-based lithography method26 Feb 2013US 8,387,160 B2International Business Machines Corporation
- Scanning probe microscope capable of measuring samples having overhang structure26 Jun 2012US 8,209,766 B2Park Systems Corp.
- Cleaning of nanostructures26 Mar 2020US 2020/0094295 A1International Business Machines Corporation
- Cleaning of nanostructures15 Mar 2018US 2018/0071797 A1International Business Machines Corporation
- Nanometer Scale Instrument for Biochemically, Chemically, or Catalytically Interacting with a Sample Material14 Jun 2012US 2012/0147722 A1General Nanotechnology LLC
- Apparatus for Direct Fabrication of Nanostructures8 Dec 2011US 2011/0297084 A1Massachusetts Institute of Technology
- Scanning probe-based lithography method27 Jan 2011US 2011/0020533 A1International Business Machines Corporation
Most cited
By later US patents
- Stepper type test structures and methods for inspection of semiconductor integrated circuits184US 6,633,174 B1KLA-Tencor Corporation · 2003
- Method and apparatus for coupling an implantable stimulator/sensor to a prosthetic device184US 6,695,885 B2Alfred E. Mann Foundation for Scientific Research · 2004
- Scanning probe microscope143US 5,376,790 APark Scientific Instruments · 1994
- Tapping atomic force microscope140US 5,412,980 ADigital Instruments, Inc. · 1995
- Jumping probe microscope123US 5,266,801 ADigital Instruments, Inc. · 1993