Scanning probe microscope for cleaning nanostructures
AssigneeInternational Business Machines Corporation
InventorPio Peter Niraj Nirmalraj
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Abstract
The present invention relates to a scanning probe microscope. The scanning probe microscope can be configured to remove a polymeric material from a surface of a nanostructure. The scanning probe microscope includes a metal coated probe tip and a voltage source. The voltage source can be configured to apply a bias voltage between the probe tip and a sample. The bias voltage can be between 0.5 V and 2 V. The scanning probe microscope further includes a sample positioner configured to position the sample in relation to the probe tip and a system controller configured to control the scanning probe microscope.
Claims16
A scanning probe microscope comprising:
- a metal coated probe tip;
- a voltage source to apply a bias voltage between the probe tip and a sample, the bias voltage being between 0.5 V and 2 V;
- a sample positioner configured to position the sample in relation to the probe tip;
- and
- a system controller configured to control the voltage source and the sample positioner, the system controller further configured to apply an electrical field between the probe tip and the sample at a strength operable to break bonds connecting a polymeric material to a surface of the sample.
A scanning probe microscope comprising:
- a probe tip having an apex tip area of more than 300 nm2 and less than 10000 nm2;
- a voltage source to apply a bias voltage between the probe tip and a sample;
- a sample positioner configured to position the sample in relation to the probe tip;
- and
- a system controller configured to control the voltage source and the sample positioner, the system controller further configured to control a strength of an electrical field between the probe tip and the sample between 102 V/m and 106 V/m and to apply a loading force between the probe tip and the sample between 0.5 nN and 10 nN, the controlled electrical field operable to break bonds connecting a polymeric material to a surface of the sample.
Dependencies are inferred from the claim text.