Jumping probe microscope
AssigneeDigital Instruments, Inc.
InventorsVirgil B. Elings, John A. Gurley
Life of this patent
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Abstract
A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.
Claims19
An atomic force microscope for measuring a physical property of a sample, comprising:
- an arm having a strain gauge which is responsive to bending of the arm;
- a probe tip mounted on said arm;
- and
- scanning means for producing relative motion between the probe tip and the sample;
- wherein said strain guage produces an output indicative of said physical property of said sample upon said scanning means producing said relative motion.
An atomic force microscope probe comprising:
- a flexible arm having a fixed end and a probe tip;
- and
- a strain gauge which is responsive to bending of the arm.
An atomic force microscope for measuring properties of a surface, comprising:
- a cantilever including a tip and a strain gauge;
- means for determining bending of the cantilever based on an output of the strain gauge;
- and
- means for scanning the tip of the cantilever over the surface of a stationary sample and gathering data at a plurality of points on the surface of the sample.
In a method of operating an atomic force microscope, wherein a probe is moved over the surface of a sample to obtain data reflecting a physical property of the surface, the improvement comprising:
- moving the probe laterally relative to the surface of the sample;
- and
- simultaneously with said step of moving said probe laterally, repeatedly lifting said probe off the surface and then returning said probe to the surface, the lifting being performed to lift the probe essentially a constant lift height above the surface of the sample at each repeated lifting;
- whereby said repeated lifting avoids the probe dragging across the surface of the sample and thereby avoids damage to the probe and the sample.
An atomic force microscope for measuring a physical property of a sample, comprising:
- an arm having a piezoelectric gauge which is responsive to bending of the arm;
- a probe tip mounted on said arm;
- and
- scanning means for producing relative motion between the probe tip and the sample;
- wherein said piezoelectric gauge produces an output indicative of said physical of said sample upon said scanning means producing said relative motion.
An atomic force microscope probe comprising:
- a flexible arm having a fixed end and a probe tip;
- and
- a piezoelectric gauge which is responsive to bending of the arm.
An atomic force microscope for measuring properties of a surface, comprising:
- a cantilever including a tip and a piezoelectric gauge;
- means for determining bending of the cantilever based on an output of the piezoelectric gauge;
- and
- means for scanning the tip of the cantilever over the surface of a stationary sample and gathering data at a plurality of points on the surface of the sample.
Dependencies are inferred from the claim text.