Y10S 427/101
Liquid source chemical depostion, i.e. lscvd or aerosol chemical vapor deposition, i.e.
Official title: Liquid Source Chemical Depostion, i.e. LSCVD or Aerosol Chemical Vapor Deposition, i.e. ACVD
Y10S427/101 (Liquid source chemical depostion, i.e. lscvd or aerosol chemical vapor deposition, i.e.) appears on 39 US grants and 12 published applications in this corpus.
Search patents in Y10S- Granted patents
- 39
- Published applications
- 12
- Assignees
- 24
- Inventors
- 67
- Latest grant
- 28 Apr 2015
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 6 | 0 |
| 2001 | 3 | 1 |
| 2002 | 3 | 1 |
| 2003 | 5 | 2 |
| 2004 | 1 | 0 |
| 2005 | 1 | 2 |
| 2006 | 2 | 1 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 1 | 2 |
| 2010 | 1 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 1 |
| 2015 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Carbon nanopipes and ductwork with nanometric walls and methods of making the same28 Apr 2015US 9,017,780 B2The United States of America as represented by the Secretary of the Navy
- Method for producing conducting and transparent films from combined graphene and conductive nano filaments28 Oct 2014US 8,871,296 B2Nanotek Instruments, Inc.
- Methods of making carbon nanopipes and ductwork with nanometric walls2 Jul 2013US 8,475,698 B2The United States of America as represented by the Secretary of the Navy
- Selective deposition of carbon nanotubes on optical fibers7 Aug 2012US 8,236,375 B2OFS Fitel, LLC
- Methods of depositing materials over substrates, and methods of forming layers over substrates14 Sep 2010US 7,794,787 B2Micron Technology, Inc.
- Method for producing conducting and transparent films from combined graphene and conductive nano filaments18 Sep 2014US 2014/0272172 A1Nanotek Instruments, Inc.
- Carbon nanopipes and ductwork with nanometric walls and methods of making the same9 May 2013US 2013/0115840 A1The Government of the United States of America, as represented by the Secretary of the Navy
- Selective deposition of carbon nanotubes on optical fibers22 Apr 2010US 2010/0098113 A1OFS Fitel, LLC
- Methods of Depositing Materials Over Substrates, and Methods of Forming Layers over Substrates27 Aug 2009US 2009/0215252 A1Micron Technology, Inc.
- Carbon nanopipes and ductwork with nanometric walls and methods of making the same19 Feb 2009US 2009/0047452 A1The Government of the United States of America, as represented by the Secretary of the Navy
Most cited
By later US patents
- Method and apparatus for material deposition120US 5,456,945 ASymetrix Corporation · 1995
- Misted deposition apparatus for fabricating an integrated circuit91US 5,540,772 ASymetrix Corporation · 1996
- Dielectric films with low dielectric constants73US 6,576,345 B12003
- Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same58US 6,541,067 B1Micron Technology, Inc. · 2003
- Liquid material supply apparatus and method50US 5,690,743 ATokyo Electron Limited · 1997