Y10S 148/042
Doping, graded, for tapered etching
Y10S148/042 (Doping, graded, for tapered etching) appears on 11 US grants and 3 published applications in this corpus.
Search patents in Y10S- Granted patents
- 11
- Published applications
- 3
- Assignees
- 9
- Inventors
- 29
- Latest grant
- 2 Jul 2019
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 3 |
| 2018 | 2 | 0 |
| 2019 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Microstructure processing method and microstructure processing apparatus2 Jul 2019US 10,336,609 B2Hitachi, Ltd.
- Atomic layer etching of tungsten and other metals9 Oct 2018US 10,096,487 B2Lam Research Corporation
- Bottom processing10 Jul 2018US 10,020,204 B2APPLIED Materials.Inc.
- Fabrication method for horizontal direction semiconductor PN junction array16 Mar 1999US 5,882,950 AKorea Institute of Science and Technology
- Semiconductor devices with low dislocation defects8 Feb 1994US 5,285,086 AAT&T Bell Laboratories
Most cited
By later US patents
- Semiconductor devices with low dislocation defects140US 5,285,086 AAT&T Bell Laboratories · 1994
- Method of forming through holes by differential etching of stacked silicon oxynitride layers105US 4,543,707 AKabushiki Kaisha · 1985
- Ultra-thin semiconductor membranes63US 4,952,446 ACornell Research Foundation, Inc. · 1990
- Schottky barrier device and method of manufacture28US 4,638,551 AGeneral Instrument Corporation · 1987
- Atomic layer etching of tungsten and other metals26US 10,096,487 B2Lam Research Corporation · 2018