H03H 9/2452
Free-free beam resonators
Official title: {Free-free beam resonators}
H03H9/2452 (Free-free beam resonators) appears on 89 US grants and 95 published applications in this corpus.
Search patents in H03H- Granted patents
- 89
- Published applications
- 95
- Assignees
- 38
- Inventors
- 111
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2001 | 1 | 4 |
| 2002 | 1 | 2 |
| 2003 | 4 | 1 |
| 2004 | 2 | 1 |
| 2005 | 2 | 2 |
| 2006 | 1 | 4 |
| 2007 | 3 | 1 |
| 2008 | 1 | 1 |
| 2009 | 1 | 0 |
| 2010 | 2 | 6 |
| 2011 | 3 | 4 |
| 2012 | 1 | 3 |
| 2013 | 3 | 2 |
| 2014 | 8 | 5 |
| 2015 | 4 | 4 |
| 2016 | 3 | 7 |
| 2017 | 2 | 4 |
| 2018 | 7 | 7 |
| 2019 | 3 | 5 |
| 2020 | 6 | 4 |
| 2021 | 7 | 5 |
| 2022 | 3 | 2 |
| 2023 | 7 | 11 |
| 2024 | 8 | 2 |
| 2025 | 3 | 6 |
| 2026 | 3 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS resonator22 Sep 2026US 12,744,514 B2KYOCERA Technologies Oy
- Vibrator device14 Jul 2026US 12,683,573 B2Seiko Epson Corporation
- MEMS resonator10 Mar 2026US 12,574,002 B2KYOCERA Technologies Oy
- MEMS resonator9 Dec 2025US 12,492,120 B2SiTime Corporation
- Dual proof-mass resonators with low support loss1 Jul 2025US 12,348,213 B2Panasonic Intellectual Property Management Co., Ltd.
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Slanted resonator13 Aug 2026US 2026/0238179 A1KYOCERA Technologies Oy
- Thin-film suspended microacoustic resonators for timing applications4 Dec 2025US 2025/0373224 A1University of Central Florida Research Foundation, Inc.
- Piezo-actuated MEMS24 Jul 2025US 2025/0239984 A1SiTime Corporation
- Mems resonator24 Apr 2025US 2025/0128937 A1SiTime Corporation
Most cited
By later US patents
- Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same268US 8,264,291 B2Sony Corporation · 2012
- Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices115US 6,577,040 B2The Regents of the University of Michigan · 2003
- Device including a micromechanical resonator having an operating frequency and method of extending same95US 6,249,073 B1The Regents of the University of Michigan · 2001
- Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device76US 6,424,074 B1The Regents of the University of Michigan · 2002
- Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator42US 6,713,938 B2The Regents of the University of Michigan · 2004