Dual proof-mass resonators with low support loss

A mechanical resonator comprising:

• two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of at least one connecting beam, the at least one connecting beam connecting the two identical proof-masses;
• and
• at least one anchor attached to a middle of the at least one connecting beam,
• wherein each of the two resonant plates are divided into outer and inner sections,
• wherein a first patterned metal layer is formed on the outer sections of the two resonant plates, and
• wherein a second patterned metal layer is formed on the inner sections of the two resonant plates.

A mechanical resonator comprising:

• two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of at least one connecting beam, the at least one connecting beam connecting the two identical proof-masses;
• and
• at least one anchor attached to a middle of the at least one connecting beam,
• wherein in case of using piezoelectric transduction, each of the two resonant plates comprises a semiconductor layer covered by a thin layer of a piezoelectric material, and
• wherein each of the two resonant plates further comprises a patterned metal layer formed as an electrode on a top of the thin layers of the piezoelectric material.