Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
AssigneeThe Regents of the University of Michigan
InventorClark T.-C. Nguyen
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Abstract
Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering signals utilizing vibrating micromechanical resonators. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.
Claims32
A method for filtering signals to obtain a desired passband of frequencies, the method comprising:
- providing a micromechanical filter apparatus including a micromechanical resonator having a fundamental resonant mode formed on a substrate and a support structure anchored to the substrate to support the resonator above the substrate;
- and
- vibrating the resonator so that the apparatus passes a desired frequency range of signals while substantially attenuating signals outside the desired frequency range, wherein the support structure is attached to the resonator and the support structure and the resonator are both dimensioned so that the resonator is isolated from the support structure during resonator vibration, wherein energy losses to the substrate are substantially eliminated and wherein the apparatus is a high-Q apparatus.
A micromechanical filter apparatus for filtering signals to obtain a desired passband of frequencies, the apparatus comprising:
- a substrate;
- a first micromechanical resonator;
- and
- a support structure anchored to the substrate to support the resonator above the substrate wherein the support structure and the resonator are both dimensioned so that the resonator is isolated from the support structure during resonator vibration wherein energy losses to the substrate are substantially eliminated and wherein the apparatus is a high-Q apparatus.
A micromechanical filter apparatus for filtering signals to obtain a desired passband of frequencies, the apparatus comprising:
- a substrate;
- a plurality of intercoupled micromechanical elements capable of resonant vibration;
- and
- a support structure anchored to the substrate to support the elements above the substrate wherein the support structure and the elements are attached at one or more locations sustaining substantially no translational movement during resonant vibration of the elements.
A micromechanical filter apparatus for filtering signals to obtain a desired passband of frequencies, the apparatus comprising:
- a substrate;
- a plurality of intercoupled micromechanical elements capable of resonant vibration;
- and
- a support structure anchored to the substrate to support the elements above the substrate wherein the support structure comprises a support beam, and wherein the support beam is attached to the elements such that the support beam sustains substantially no translational movement during resonant vibration of the elements.
Dependencies are inferred from the claim text.