H03H 9/02401
By annealing
Official title: {by annealing}
H03H9/02401 (By annealing) appears on 24 US grants and 21 published applications in this corpus.
Search patents in H03H- Granted patents
- 24
- Published applications
- 21
- Assignees
- 15
- Inventors
- 41
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 2 |
| 2006 | 2 | 4 |
| 2007 | 3 | 2 |
| 2008 | 2 | 1 |
| 2009 | 0 | 0 |
| 2010 | 2 | 2 |
| 2011 | 2 | 1 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 1 | 2 |
| 2018 | 1 | 1 |
| 2019 | 1 | 1 |
| 2020 | 1 | 1 |
| 2021 | 0 | 0 |
| 2022 | 1 | 2 |
| 2023 | 1 | 0 |
| 2024 | 1 | 0 |
| 2025 | 1 | 2 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Microelectromechanical resonator18 Aug 2026US 12,712,521 B2SiTime Corporation
- Microelectromechanical resonator4 Feb 2025US 12,218,647 B2SiTime Corporation
- Microelectromechanical resonator27 Feb 2024US 11,916,534 B2SiTime Corporation
- Microelectromechanical resonator13 Jun 2023US 11,677,379 B2SiTime Corporation
- Microelectromechanical resonator18 Jan 2022US 11,228,298 B2SiTime Corporation
- Microelectromechanical resonator24 Jul 2025US 2025/0239989 A1SiTime Corporation
- Microelectromechanical resonator2 Jan 2025US 2025/0007492 A1SiTime Corporation
- Microelectromechanical resonator20 Oct 2022US 2022/0337218 A1SiTime Corporation
- Microelectromechanical resonator26 May 2022US 2022/0166403 A1SiTime Corporation
- Microelectromechanical resonator23 Jan 2020US 2020/0028485 A1SiTime Corporation
Most cited
By later US patents
- Method for adjusting the frequency of a MEMS resonator43US 7,102,467 B2Robert Bosch GmbH · 2006
- Method and system for locally annealing a microstructure formed on a substrate and device formed thereby42US 5,976,994 AThe Regents of the University of Michigan · 1999
- Temperature controlled MEMS resonator and method for controlling resonator frequency40US 7,068,125 B2Robert Bosch GmbH · 2006
- Method and system for locally annealing a microstructure formed on a substrate and device formed thereby37US 6,169,321 AThe Regents of the University of Michigan · 2001
- Capacitive vertical silicon bulk acoustic resonator28US 7,176,770 B2Georgia Tech Research Corporation · 2007