Microelectromechanical resonator

A method of fabricating a microelectromechanical system (MEMS) device having a substrate and first and second electrical terminals, the method comprising:

• forming a moveable micromachined member having a piezoelectric insulating layer disposed between first and second electrically conductive layers;
• and
• forming first and second mechanical structures that secure the moveable micromachined member to the substrate and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between the first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.