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US 7,068,125 B2Granted
Temperature controlled MEMS resonator and method for controlling resonator frequency
AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Aaron Partridge
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AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Aaron Partridge
Estimating the term…
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical resonators having mechanical structures that include integrated heating and/or temperature sensing elements. In another aspect, the present invention is directed to fabricate, manufacture, provide and/or control microelectromechanical resonators having mechanical structures that are encapsulated using thin film or wafer level encapsulation techniques in a chamber, and including heating and/or temperature sensing elements disposed in the chamber, on the chamber and/or integrated within the mechanical structures. Other aspects of the inventions will be apparent from the detailed description and claims herein.
A MEMS resonator having a resonant frequency defined in relation to an operating temperature, comprising:
A MEMS resonator having a resonant frequency defined in relation to an operating temperature, comprising:
A method of controlling the resonant frequency of a MEMS resonator, wherein the MEMS resonator comprises a first substrate anchor comprising a first electrical contact, a second substrate anchor comprising a second electrical contact, and a beam structure fixed at a first end by the first substrate anchor and at a second end by the second substrate anchor, the method comprising:
A method of controlling the resonant frequency of a MEMS resonator, wherein the MEMS resonator comprises a first substrate anchor comprising a first electrical contact, a second substrate anchor comprising a second electrical contact, and a beam structure fixed at a first end by the first substrate anchor and at a second end by the second substrate anchor, the method comprising:
A method of controlling the resonant frequency of a MEMS resonator at an operating temperature, wherein the MEMS resonator comprises a first substrate anchor fixed between first and second electrical contacts and a beam structure comprising a first end thermally coupled to the first substrate anchor, the method comprising:
Dependencies are inferred from the claim text.