H01S 3/134
In gas lasers
Official title: in gas lasers
H01S3/134 (In gas lasers) appears on 326 US grants and 276 published applications in this corpus.
Search patents in H01S- Granted patents
- 326
- Published applications
- 276
- Assignees
- 82
- Inventors
- 546
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 2 | 0 |
| 1978 | 2 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 3 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 6 | 0 |
| 1988 | 4 | 0 |
| 1989 | 1 | 0 |
| 1990 | 6 | 0 |
| 1991 | 2 | 0 |
| 1992 | 5 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 3 | 0 |
| 1996 | 3 | 0 |
| 1997 | 6 | 0 |
| 1998 | 6 | 0 |
| 1999 | 6 | 0 |
| 2000 | 8 | 0 |
| 2001 | 15 | 4 |
| 2002 | 17 | 32 |
| 2003 | 14 | 13 |
| 2004 | 22 | 15 |
| 2005 | 13 | 16 |
| 2006 | 11 | 11 |
| 2007 | 13 | 7 |
| 2008 | 8 | 8 |
| 2009 | 5 | 2 |
| 2010 | 8 | 2 |
| 2011 | 1 | 7 |
| 2012 | 6 | 2 |
| 2013 | 0 | 4 |
| 2014 | 6 | 3 |
| 2015 | 7 | 13 |
| 2016 | 11 | 12 |
| 2017 | 13 | 7 |
| 2018 | 8 | 19 |
| 2019 | 11 | 11 |
| 2020 | 6 | 16 |
| 2021 | 13 | 14 |
| 2022 | 10 | 11 |
| 2023 | 9 | 9 |
| 2024 | 8 | 11 |
| 2025 | 7 | 17 |
| 2026 | 4 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Excimer laser with improved beam uniformity and stability16 Jun 2026US 12,658,666 B2Coherent LaserSystems GmbH & Co. KG
- Apparatus for and method of generating multiple laser beams24 Mar 2026US 12,586,978 B2Cymer, Inc.
- Predictive calibration scheduling apparatus and method3 Feb 2026US 12,540,850 B2Cymer, Inc.
- Laser apparatus and method for manufacturing electronic devices6 Jan 2026US 12,517,436 B2Gigaphoton Inc.
- Control method of discharge-excitation type laser device, discharge-excitation type laser device, and electronic device manufacturing method9 Dec 2025US 12,494,616 B2Gigaphoton Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196790 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196791 A1Gigaphoton Inc.
- Excitation laser system, method of operating excitation laser system, and extreme ultraviolet photolithograpy apparatus including excitation laser system11 Jun 2026US 2026/0161093 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Pulse energy control for excimer laser146US 6,005,879 ACymer, Inc. · 1999
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Narrow band laser with fine wavelength control137US 6,192,064 B1Cymer, Inc. · 2001