Control method of discharge-excitation type laser device, discharge-excitation type laser device, and electronic device manufacturing method

A discharge-excitation type laser device comprising:

• a power source configured to control a pulse energy of pulse laser light;
• and
• a processor configured to control the power source,
• the processor being configured, during a first period, to output the pulse laser light including a plurality of pulses from a discharge-excitation type laser device while periodically changing a wavelength, and calculate correction data for correcting a voltage command value to be set to the power source in accordance with a change in the wavelength by using first time-series data of pulse energies of the plurality of pulses, and during a second period, to acquire the voltage command value, correct the acquired voltage command value using the correction data, and output the pulse laser light from the discharge-excitation type laser device in accordance with the corrected voltage command value.

An electronic device manufacturing method, comprising:

• generating pulse laser light using a discharge-excitation type laser device;
• outputting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
• the discharge-excitation type laser device including:
• a power source configured to control a pulse energy of the pulse laser light;
• and
• a processor configured to control the power source,
• the processor being configured, during a first period, to output the pulse laser light including a plurality of pulses from a discharge-excitation type laser device while periodically changing a wavelength, and calculate correction data for correcting a voltage command value to be set to the power source in accordance with a change in the wavelength by using first time-series data of pulse energies of the plurality of pulses, and during a second period, to acquire the voltage command value, correct the acquired voltage command value using the correction data, and output the pulse laser light from the discharge-excitation type laser device in accordance with the corrected voltage command value.