H01S 3/08009
Using a diffraction grating
Official title: {using a diffraction grating}
H01S3/08009 (Using a diffraction grating) appears on 457 US grants and 500 published applications in this corpus.
Search patents in H01S- Granted patents
- 457
- Published applications
- 500
- Assignees
- 184
- Inventors
- 822
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 3 | 0 |
| 1978 | 4 | 0 |
| 1979 | 2 | 0 |
| 1980 | 2 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 3 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 4 | 0 |
| 1995 | 7 | 0 |
| 1996 | 2 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 9 | 0 |
| 2000 | 10 | 0 |
| 2001 | 11 | 1 |
| 2002 | 12 | 44 |
| 2003 | 18 | 16 |
| 2004 | 26 | 15 |
| 2005 | 17 | 13 |
| 2006 | 9 | 24 |
| 2007 | 13 | 11 |
| 2008 | 9 | 13 |
| 2009 | 15 | 9 |
| 2010 | 12 | 15 |
| 2011 | 12 | 11 |
| 2012 | 11 | 18 |
| 2013 | 12 | 19 |
| 2014 | 18 | 13 |
| 2015 | 13 | 22 |
| 2016 | 19 | 19 |
| 2017 | 24 | 16 |
| 2018 | 16 | 29 |
| 2019 | 24 | 20 |
| 2020 | 13 | 19 |
| 2021 | 12 | 18 |
| 2022 | 15 | 26 |
| 2023 | 12 | 30 |
| 2024 | 13 | 19 |
| 2025 | 18 | 29 |
| 2026 | 14 | 31 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electronic device manufacturing method and lithography control processor8 Sep 2026US 12,730,385 B2Gigaphoton Inc.
- Temporal contrast improvement for short pulse lasers via ionization gratings28 Apr 2026US 12,614,887 B2Lawrence Livermore National Security, LLC
- Dual spectral variable-based optical frequency scanning laser light source and measurement device using the same and object angle-dependent distance measurement device using propagation angle switching for each optical frequency21 Apr 2026US 12,609,504 B2Pusan National University Industry-University Cooperation Foundation
- Predictive control of a pulsed light beam7 Apr 2026US 12,597,754 B2Cymer, Inc.
- Wavelength measurement apparatus, narrowed-line laser apparatus, and method for manufacturing electronic devices10 Mar 2026US 12,571,680 B2Gigaphoton Inc.
- High-precision tunable laser control system based on pulse width regulation17 Sep 2026US 2026/0280221 A1Hefei Institutes of Physical Science, CAS
- Dual spectral variable-based optical frequency scanning laser light source and measurement device using the same and object angle-dependent distance measurement device using propagation angle switching for each optical frequency30 Jul 2026US 2026/0221710 A1Pusan National University Industry-University Cooperation Foundation
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
- Laser device and electronic device manufacturing method23 Jul 2026US 2026/0213485 A1Gigaphoton Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
Most cited
By later US patents
- Method and apparatus for performing optical frequency domain reflectometry488US 6,160,826 AMassachusetts Institute of Technology · 2000
- Method and apparatus for performing optical measurements using a rapidly frequency-tuned laser478US 5,956,355 AMassachusetts Institute of Technology · 1999
- Method and apparatus for performing optical imaging using frequency-domain interferometry229US 7,733,497 B2The General Hospital Corporation · 2010
- Alternating sequential half duplex communication system218US 4,979,170 AQUALCOMM Incorporated · 1990
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000