H01S 3/041
For gas lasers
Official title: for gas lasers {(H01S3/0401 takes precedence)}
H01S3/041 (For gas lasers) appears on 380 US grants and 250 published applications in this corpus.
Search patents in H01S- Granted patents
- 380
- Published applications
- 250
- Assignees
- 146
- Inventors
- 690
- Latest grant
- 3 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 5 | 0 |
| 1981 | 5 | 0 |
| 1982 | 4 | 0 |
| 1983 | 5 | 0 |
| 1984 | 6 | 0 |
| 1985 | 7 | 0 |
| 1986 | 9 | 0 |
| 1987 | 20 | 0 |
| 1988 | 18 | 0 |
| 1989 | 8 | 0 |
| 1990 | 6 | 0 |
| 1991 | 4 | 0 |
| 1992 | 10 | 0 |
| 1993 | 8 | 0 |
| 1994 | 11 | 0 |
| 1995 | 4 | 0 |
| 1996 | 4 | 0 |
| 1997 | 4 | 0 |
| 1998 | 6 | 0 |
| 1999 | 3 | 0 |
| 2000 | 4 | 0 |
| 2001 | 8 | 4 |
| 2002 | 10 | 31 |
| 2003 | 16 | 9 |
| 2004 | 16 | 21 |
| 2005 | 12 | 16 |
| 2006 | 14 | 9 |
| 2007 | 16 | 9 |
| 2008 | 5 | 5 |
| 2009 | 7 | 4 |
| 2010 | 7 | 8 |
| 2011 | 2 | 3 |
| 2012 | 9 | 9 |
| 2013 | 6 | 7 |
| 2014 | 9 | 16 |
| 2015 | 11 | 16 |
| 2016 | 19 | 10 |
| 2017 | 12 | 14 |
| 2018 | 8 | 7 |
| 2019 | 9 | 6 |
| 2020 | 3 | 6 |
| 2021 | 4 | 9 |
| 2022 | 3 | 3 |
| 2023 | 4 | 7 |
| 2024 | 6 | 5 |
| 2025 | 6 | 5 |
| 2026 | 1 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for limiting the deflection of a laser head during temperature changes and a laser head3 Feb 2026US 12,542,411 B2Sec Technologies, S.R.O.
- Disc laser14 Oct 2025US 12,444,897 B2Idea Machine Development Design & Production Ltd.
- Radio frequency slab laser26 Aug 2025US 12,401,168 B2Kern Technologies, LLC
- Methods and systems for aligning master oscillator power amplifier systems1 Jul 2025US 12,347,997 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Chamber device, and electronic device manufacturing method10 Jun 2025US 12,327,975 B2Gigaphoton Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196790 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196791 A1Gigaphoton Inc.
- Chamber apparatus for laser, laser apparatus, and electronic device manufacturing method25 Jun 2026US 2026/0180275 A1Gigaphoton Inc.
- Laser chamber and electronic device manufacturing method4 Jun 2026US 2026/0155616 A1Gigaphoton Inc.
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Extreme repetition rate gas discharge laser with improved blower motor101US 6,477,193 B2Cymer, Inc. · 2002
- Injection seeded laser with precise timing control96US 6,549,551 B2Cymer, Inc. · 2003