H01J 3/07
Arrangements for controlling convergence of a plurality of beams
H01J3/07 (Arrangements for controlling convergence of a plurality of beams) appears on 6 US grants and 7 published applications in this corpus.
Search patents in H01J- Granted patents
- 6
- Published applications
- 7
- Assignees
- 3
- Inventors
- 10
- Latest grant
- 10 Dec 2024
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|---|---|---|
| 2004 | 0 | 1 |
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| 2006 | 1 | 0 |
| 2007 | 0 | 3 |
| 2008 | 3 | 1 |
| 2009 | 1 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
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| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
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| 2021 | 0 | 0 |
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| 2024 | 1 | 1 |
By publication year.
Recent patents
- Electron gun and electron beam application apparatus10 Dec 2024US 12,165,828 B2Hitachi High-Tech Corporation
- Apparatus for generating a plurality of beamlets4 Aug 2009US 7,569,833 B2Mapper Lithography IP B.V.
- Apparatus for generating a plurality of beamlets24 Jun 2008US 7,391,037 B2Mapper Lithography IP B.V.
- Apparatus for generating a plurality of beamlets29 Apr 2008US 7,365,338 B2Mapper Lithography IP B.V.
- Apparatus for generating a plurality of beamlets25 Mar 2008US 7,348,567 B1Mapper Lithography IP B.V.
- Electron gun and electron beam application apparatus11 Apr 2024US 2024/0120168 A1Hitachi High-Tech Corporation
- Electron beam apparatus, and x-ray generation apparatus and scanning electron microscope each including the same20 Dec 2018US 2018/0366294 A1Shimadzu Corporation
- Apparatus for generating a plurality of beamlets27 Mar 2008US 2008/0073547 A1Mapper Lithography IP B.V.
- Apparatus for generating a plurality of beamlets8 Feb 2007US 2007/0029499 A1Mapper Lithography IP B.V.
- Apparatus for generating a plurality of beamlets8 Feb 2007US 2007/0029509 A1Mapper Lithography IP B.V.
Most cited
By later US patents
- Apparatus for generating a plurality of beamlets112US 7,129,502 B2Mapper Lithography IP B.V. · 2006
- Apparatus for generating a plurality of beamlets9US 7,569,833 B2Mapper Lithography IP B.V. · 2009
- Apparatus for generating a plurality of beamlets5US 7,365,338 B2Mapper Lithography IP B.V. · 2008
- Apparatus for generating a plurality of beamlets5US 7,391,037 B2Mapper Lithography IP B.V. · 2008
- Apparatus for generating a plurality of beamlets4US 7,348,567 B1Mapper Lithography IP B.V. · 2008