Electron beam apparatus, and x-ray generation apparatus and scanning electron microscope each including the same
AssigneeShimadzu Corporation
InventorAkihiro MIYAOKA
Life of this patent
Estimating the term…
Abstract
An electron beam apparatus includes: a cathode configured to emit electrons; an anode that is an electrode which forms an electric field such that an electron beam is formed by the electrons emitted from the cathode, and that is formed with a first hole through which the electron beam passes; an aperture member formed with an opening that shades a part of the electron beam which passes through the anode; and a convergence electrode that is an electrode which forms an electric field such that the electron beam which passes through the opening converges, and that is configured to include one single-hole electrode formed with a second hole through which the electron beam passes.
Claims10
An electron beam apparatus comprising:
- a cathode configured to emit electrons;
- an anode that is an electrode which forms an electric field such that an electron beam is formed by the electrons emitted from the cathode, and that is formed with a first hole through which the electron beam passes;
- an aperture member formed with an opening that shields a part of the electron beam which passes through the anode;
- and
- a final-stage electron lens that is an electrode which forms an electric field such that the electron beam which passes through the opening converges, and that is configured to include one single-hole electrode formed with a second hole through which the electron beam passes.
Dependencies are inferred from the claim text.