H01J 2237/2487
Using digital signal processors
Official title: using digital signal processors
H01J2237/2487 (Using digital signal processors) appears on 103 US grants and 110 published applications in this corpus.
Search patents in H01J- Granted patents
- 103
- Published applications
- 110
- Assignees
- 43
- Inventors
- 238
- Latest grant
- 28 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 2 |
| 2002 | 0 | 3 |
| 2003 | 3 | 3 |
| 2004 | 6 | 7 |
| 2005 | 4 | 7 |
| 2006 | 9 | 21 |
| 2007 | 8 | 15 |
| 2008 | 21 | 5 |
| 2009 | 5 | 9 |
| 2010 | 9 | 4 |
| 2011 | 4 | 1 |
| 2012 | 6 | 2 |
| 2013 | 2 | 2 |
| 2014 | 3 | 3 |
| 2015 | 2 | 2 |
| 2016 | 2 | 3 |
| 2017 | 1 | 0 |
| 2018 | 0 | 2 |
| 2019 | 3 | 2 |
| 2020 | 3 | 2 |
| 2021 | 1 | 2 |
| 2022 | 1 | 4 |
| 2023 | 3 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 2 |
| 2026 | 2 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Automatic electron beam calibration on periodic nanostructures28 Apr 2026US 12,614,693 B2Snap Inc.
- Sparse sampling using a programmatically randomized signal modulating a carrier signal31 Mar 2026US 12,592,358 B1Synchrotron Research, Inc.
- Operating a particle beam apparatus18 Nov 2025US 12,476,072 B2Carl Zeiss Microscopy GmbH
- Estimation model generation method and electron microscope12 Dec 2023US 11,842,880 B2JEOL Ltd.
- Substrate processing system, substrate processing method, and controller21 Nov 2023US 11,823,877 B2Tokyo Electron Limited
- Direct digitizing detection channel13 Aug 2026US 2026/0237596 A1ASML Netherlands B. V.
- Scanning compensation method of electron beam inspection device, product and apparatus13 Aug 2026US 2026/0237597 A1Dongfang Jingyuan Electron Limited
- Operating a particle beam apparatus30 Jul 2026US 2026/0221382 A1Carl Zeiss Microscopy GmbH
- Automatic electron beam calibration on periodic nanostructures23 Jul 2026US 2026/0213121 A1Snap Inc.
- Methods and apparatus for adaptive charge neutralization using an antenna mounted to an ion emitter5 Mar 2026US 2026/0066213 A1
Most cited
By later US patents
- Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus74US 6,107,637 AHitachi, Ltd. · 2000
- Autoadjusting electron microscope50US 6,570,156 B1Hitachi, Ltd. · 2003
- Scanning particle beam instrument48US 7,348,557 B2Carl Zeiss SMT GmbH · 2008
- Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus34US 7,692,144 B2Hitachi, Ltd. · 2010
- Method of inspecting pattern and inspecting instrument30US 6,583,414 B2Hitachi, Ltd. · 2003