Back to results
US 11,842,880 B2Granted
Estimation model generation method and electron microscope
AssigneeJEOL Ltd.
InventorsRyusuke Sagawa, Shigeyuki Morishita, Fuminori Uematsu, Tomohiro Nakamichi, Keito Aibara
Life of this patent
Estimating the term…
Abstract
An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.
Claims8
A method of generating an estimation model, the method comprising:
- generating a plurality of calculated Ronchigrams by repeatedly executing a simulation while changing a simulation condition;
- and
- improving an estimation model in a learner by sequentially supplying, to the learner, a plurality of sets of training data formed from the plurality of calculated Ronchigrams and a plurality of sets of correct answer data corresponding to the plurality of calculated Ronchigrams, wherein
- the estimation model is a model for estimating one or a plurality of aberration values which are referred to in aberration correction in an electron microscope, and
- each set of correct answer data is data indicating one or a plurality of hypothetical aberration values included in each simulation condition.
2 more elements
Dependencies are inferred from the claim text.