H01J 2209/017
Cleaning
H01J2209/017 (Cleaning) appears on 25 US grants and 22 published applications in this corpus.
Search patents in H01J- Granted patents
- 25
- Published applications
- 22
- Assignees
- 20
- Inventors
- 66
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 3 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 2 |
| 2002 | 2 | 2 |
| 2003 | 2 | 1 |
| 2004 | 3 | 0 |
| 2005 | 0 | 1 |
| 2006 | 0 | 2 |
| 2007 | 0 | 4 |
| 2008 | 0 | 2 |
| 2009 | 1 | 0 |
| 2010 | 3 | 2 |
| 2011 | 2 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 1 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 2 |
| 2022 | 1 | 0 |
| 2023 | 0 | 0 |
| 2024 | 1 | 1 |
| 2025 | 0 | 0 |
| 2026 | 1 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Mechanical design of electro-hydrodynamic air mover apparatus15 Sep 2026US 12,736,042 B2Ventiva, Inc.
- Method and system for cleaning a field emission cathode device28 May 2024US 11,996,282 B2NCX Corporation
- Mass spectrometry sweep cone cleaning by means of ultrasonic vibration1 Nov 2022US 11,488,817 B2Thermo Finnigan LLC
- Ion source apparatus9 Oct 2018US 10,096,445 B1Bohhen Optronics Co., Ltd.
- Method and apparatus for extracting ions from an ion source for use in ion implantation5 Feb 2013US 8,368,309 B2SemEquip, Inc.
- Electrode cleaning apparatus for electro-hydrodynamic air mover device9 Apr 2026US 2026/0097422 A1Ventiva, Inc.
- Mechanical design of electro-hydrodynamic air mover apparatus9 Apr 2026US 2026/0098526 A1Ventiva, Inc.
- Isolation housing for electro-hydrodynamic air mover device9 Apr 2026US 2026/0098527 A1Ventiva, Inc.
- Method and system for cleaning a field emission cathode device7 Mar 2024US 2024/0079197 A1NCX Corporation
- Methods and Apparatus For Controlling Contaminant Deposition on a Dynode Electron-Emissive Surface10 Jun 2021US 2021/0175043 A1Adaptas Solutions Pty Ltd
Most cited
By later US patents
- Method and apparatus for extending equipment uptime in ion implantation28US 7,629,590 B2SemEquip, Inc. · 2009
- Method and apparatus for extending equipment uptime in ion implantation19US 7,820,981 B2SemEquip, Inc. · 2010
- Ion source apparatus and cleaning optimized method thereof19US 7,947,129 B2SEN Corporation, an SHI and Axcelis Company · 2011
- Mask washing system and method13US 5,114,494 AZenith Electronics Corporation · 1992
- Controlling the flow of vapors sublimated from solids9US 7,723,700 B2SemEquip, Inc. · 2010