Method and apparatus for extracting ions from an ion source for use in ion implantation
AssigneeSemEquip, Inc.
InventorsThomas N. Horsky, Robert W. Milgate, III, George P. Sacco, Jr., Dale Conrad Jacobson, Wade Allen Krull
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Abstract
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
Claims23
An ion extraction electrode assembly constructed for use in an ion implantation system, the ion implantation system having an ion source that has a low temperature operating mode for ionizing gasses and vapors at relatively low temperatures below 400° C., the ion extraction electrode assembly comprising:
- a temperature controlled extraction electrode comprising a suppression electrode element and a ground electrode element, said extraction electrode configured to extract ions from the ion source as an ion beam for transport to a surface for ion implantation, and
- a temperature controllable heater disposed between said suppression electrode element and said ground electrode element, said heater configured to maintain the extraction electrode at a temperature sufficient to prevent condensation on the electrode of gases or vapors, said extraction electrode and said controllable heater configured to form an assembly, wherein the ion extraction electrode is capable of being heated to about 150 C. for alternative operation with decaborane and octadecaborane.
An ion implantation system comprising an ion extraction electrode assembly comprising a suppression electrode element and a ground electrode element fixedly disposed relative to each other and installed in a vacuum housing in position adjacent an ion source to extract ions from the ion source through an extraction aperture to form an ion beam for implantation, the ion source having a high temperature operating mode, the ion extraction electrode assembly being comprised of aluminum and combined with a cooling device for operation during high temperature operation of the ion source to cool the electrode to a temperature below about 400 C., wherein the ion extraction electrode assembly is capable of being heated to about 150 C. for alternative operation with decaborane and octadecaborane.
Dependencies are inferred from the claim text.