Ion source apparatus
AssigneeBohhen Optronics Co., Ltd.
InventorsShih-Tse Wang, Chin-Chih Tsai, Tsai-Cheng Wang
Life of this patent
Estimating the term…
Abstract
An ion source apparatus has a body, a heat dissipating base, at least two supporting shafts, a guiding block, and a shunt. The body has a holding chamber formed inside the body. The heat dissipating base is located in the holding chamber of the body. The at least two supporting shafts are mounted through the heat dissipating base. The guiding block is mounted on the at least two supporting shafts, and is a hollow circular block. The shunt is located at a center of a top surface of the heat dissipating base, and is located below the mounting hole of the guiding block.
Claims8
An ion source apparatus comprising:
- a body having
- a holding chamber formed inside the body;
- a heat dissipating base located in the holding chamber of the body and having
- a transmitting element mounted in the holding chamber;
- a first heat dissipating plate located under the transmitting element and being an annular disk;
- and
- a second heat dissipating plate mounted on a top surface of the transmitting element, and being an annular disk;
- at least two supporting shafts mounted through the heat dissipating base, each one of the at least two supporting shafts having:
- a base portion made of ceramics;
- an abutting portion made of copper, and abutting a top surface of the base portion, and the abutting portion of each supporting shaft extending out of a top surface of the second heat dissipating plate;
- and
- a guiding wire mounted at a bottom portion of the supporting shaft;
- a guiding block mounted on the at least two supporting shafts, and being a hollow circular block;
- and
- a shunt located at a center of the top surface of the second heat dissipating plate, and located below the guiding block.
Dependencies are inferred from the claim text.