Method and system for cleaning a field emission cathode device
AssigneeNCX Corporation
InventorsJian Zhang, Cheng Qian
Life of this patent
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Abstract
A method and system for cleaning a field emission cathode device, the field emission cathode device including a substrate having a field emission layer engaged therewith, includes engaging the field emission cathode device with a vibration device such that the substrate is disposed above the field emission layer. The field emission cathode device is then vibrated with the vibration device in an X, Y, or Z direction at a predetermined frequency and at a predetermined amplitude for a predetermined time duration so as to clean the field emission cathode device by dislodging non-embedded particles from the field emission layer.
Claims10
A method of cleaning a field emission cathode device, the field emission cathode device including a substrate having a field emission layer engaged therewith, said method comprising:
- engaging the field emission cathode device with a vibration device such that the substrate is disposed above the field emission layer;
- and
- vibrating the field emission cathode device with the vibration device in an X, Y, or Z direction at a predetermined frequency and at a predetermined amplitude for a predetermined time duration so as to clean the field emission cathode device by dislodging non-embedded particles from the field emission layer.
A system for cleaning a field emission cathode device, the field emission cathode device including a substrate having a field emission layer engaged therewith, said system comprising:
- a vibration device arranged to receive the field emission cathode device such that the substrate is disposed above the field emission layer, the vibration device being further arranged to vibrate the field emission cathode device in an X, Y, or Z direction at a predetermined frequency and at a predetermined amplitude for a predetermined time duration so as to clean the field emission cathode device by dislodging non-embedded particles from the field emission layer.
Dependencies are inferred from the claim text.