G05B 2219/45027
Masking, project image on wafer semiconductor, photo tracer
G05B2219/45027 (Masking, project image on wafer semiconductor, photo tracer) appears on 28 US grants and 20 published applications in this corpus.
Search patents in G05B- Granted patents
- 28
- Published applications
- 20
- Assignees
- 15
- Inventors
- 69
- Latest grant
- 22 Apr 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 2 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 2 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 1 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 2 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 1 |
| 2016 | 1 | 1 |
| 2017 | 0 | 0 |
| 2018 | 1 | 1 |
| 2019 | 1 | 3 |
| 2020 | 3 | 2 |
| 2021 | 1 | 1 |
| 2022 | 1 | 2 |
| 2023 | 2 | 3 |
| 2024 | 0 | 0 |
| 2025 | 1 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Semiconductor wafer cooling22 Apr 2025US 12,282,318 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor wafer cooling26 Sep 2023US 11,768,484 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Synchronized parallel tile computation for large area lithography simulation5 Sep 2023US 11,747,786 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Synchronized parallel tile computation for large area lithography simulation24 May 2022US 11,340,584 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Synchronized parallel tile computation for large area lithography simulation9 Feb 2021US 10,915,090 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor wafer cooling3 Jul 2025US 2025/0216841 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor wafer cooling30 Nov 2023US 2023/0384776 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Back-end processing systems and methods for device identification21 Sep 2023US 2023/0297079 A1Lattice Semiconductor Corporation
- Machine learning & integrated metrology for run-to-run optimization of chip-to-wafer alignment accuracy31 Aug 2023US 2023/0274987 A1APPLIED Materials.Inc.
- Semiconductor wafer cooling6 Oct 2022US 2022/0317668 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method and apparatus for wafer disposition based on systematic error modeling42US 5,960,185 AInternational Business Machines Corporation · 1999
- Work supplying method and apparatus to batch process apparatus for semiconductor wafer with preferential treatment to time critical lots12US 5,930,137 ANEC Corporation · 1999
- Correction of pattern-dependent errors in a particle beam lithography system12US 6,177,680 B1International Business Machines Corporation · 2001
- Method and apparatus for enhancing optical photoplotter accuracy10US 4,851,656 AThe Gerber Scientific Instrument Company · 1989
- Projection exposure apparatus and method that floats a plate10US 6,094,255 ANikon Corporation · 2000