Projection exposure apparatus and method that floats a plate
AssigneeNikon Corporation
InventorKazuya Ota
Life of this patent
Estimating the term…
Abstract
A projection exposure apparatus controls the position of a mask so that the mask is in a desired position without reducing throughput even if the size of the mask is increased. For example, a controller adjusts the pressure of air blown from air holes so that a reticle is floated at a desired distance above a reticle floating plate. The controller also controls the driving of linear motors having stators and sliders, thereby adjusting the pressing force of control bars in contact with the sides of the floating reticle to press the sides of the reticle and control the two-dimensional position of the reticle. Therefore, it is possible to control a mask so that the mask is placed in a desired position without reducing throughput.
Claims29
A projection exposure apparatus for projecting an image of a pattern formed on a mask onto a reactive substrate via a projection optical system, comprising:
- floating means for floating the mask above a surface of the floating means so that the floated mask has no contact with the surface of the floating means;
- position control means for controlling a planar position of the floated mask in a plane by pressing at least one side of the floated mask;
- position measuring means for measuring the planar position of the floated mask in the plane;
- and
- control means for controlling the position control means in accordance with the planar position of the floated mask measured by the position measuring means.
A projection exposure apparatus for projecting an image of a pattern formed on a mask onto a reactive substrate via a projection optical system, comprising:
- a non-contact support system that causes the mask to float over a surface without contacting the floated mask;
- a position controller in selective engagement with at least one side of the floated mask to control a planar position of the floated mask in a plane by selectively pressing the at least one side of the floated mask;
- a position sensor that measures the planar position of the floated mask in the plane;
- and
- a controller coupled to the position controller and to the position sensor to control the position controller in accordance with the planar position of the floated mask measured by the position sensor.
A method of positioning a mask in a projection exposure apparatus that projects an image of a pattern formed on the mask onto a reactive substrate, the method comprising the steps of:
- floating the mask above a surface without contacting the floated mask;
- measuring a planar position of the floated mask in a plane;
- and
- controlling the planar position of the floated mask in the plane by pressing at least one side of the floated mask in accordance with the measured planar position of the floated mask.
A projection exposure apparatus for projecting an image of a pattern formed on a mask onto a reactive substrate via a projection optical system, comprising:
- a non-contact support system that causes the mask to float over a surface without contacting the floated mask;
- a position controller in engagement with at least one side of the floated mask to control a planar position of the floated mask in a plane by pressing the at least one side of the floated mask;
- and
- a position sensor that incrementally measures the planar position of the floated mask in the plane.
A projection exposure apparatus comprising:
- a non-contact support system that causes a mask plate to float over a surface without contacting the floated mask plate;
- a position controller in engagement with the floated mask plate to control a position of the floated mask plate;
- and
- a position sensor that incrementally measures the position of the floated mask plate.
A method of positioning a mask plate in a projection exposure apparatus, the method comprising the steps of:
- floating the mask plate above a surface without contacting the floated mask plate;
- incrementally measuring a position of the floated mask plate;
- and
- controlling the position of the floated mask plate by pressing at least one side of the floated mask plate.
Dependencies are inferred from the claim text.