Synchronized parallel tile computation for large area lithography simulation

A system comprising:

• a manager machine configured to:
• partition an IC design layout into a plurality of simulation boxes, each including an overlapped region, and
• assign each simulation box of the plurality of simulation boxes to one of a plurality of worker machines;
• and
• the plurality of worker machines, each configured to:
• receive an assignment of a respective simulation box of the plurality of simulation boxes;
• compute a first image value of a point within the overlapped region of the respective simulation box for a first imaging step;
• communicate with another worker machine of the plurality of worker machines having a simulation box sharing the overlapped region to provide a first updated image value of the point;
• compute a second image value of the point for a second imaging step based on the first updated image value of the point.

A system comprising:

• a manager machine configured to:
• partition an IC design layout into a plurality of simulation boxes, each including an overlapped region;
• assign each simulation box of the plurality of simulation boxes to one of a plurality of worker machines;
• and
• provide instructions to the plurality of worker machines defining communication partners for each of the plurality of worker machines;
• and
• the plurality of worker machines, each configured to:
• receive an assignment of a respective simulation box of the plurality of simulation boxes;
• compute a first image value of a point within the overlapped region of the respective simulation box for a first imaging step;
• communicate with another worker machine of the plurality of worker machines having a simulation box sharing the overlapped region to provide a first updated image value of the point;
• compute a second image value of the point for a second imaging step based on the first updated image value of the point.