G01N 2021/8825
Separate detection of dark field and bright field
Official title: {Separate detection of dark field and bright field}
G01N2021/8825 (Separate detection of dark field and bright field) appears on 256 US grants and 280 published applications in this corpus.
Search patents in G01N- Granted patents
- 256
- Published applications
- 280
- Assignees
- 131
- Inventors
- 583
- Latest grant
- 17 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 3 | 0 |
| 2000 | 3 | 0 |
| 2001 | 4 | 5 |
| 2002 | 3 | 20 |
| 2003 | 8 | 10 |
| 2004 | 10 | 18 |
| 2005 | 14 | 19 |
| 2006 | 14 | 14 |
| 2007 | 13 | 23 |
| 2008 | 16 | 10 |
| 2009 | 17 | 18 |
| 2010 | 21 | 11 |
| 2011 | 10 | 8 |
| 2012 | 7 | 11 |
| 2013 | 9 | 7 |
| 2014 | 4 | 7 |
| 2015 | 7 | 10 |
| 2016 | 4 | 4 |
| 2017 | 14 | 6 |
| 2018 | 6 | 9 |
| 2019 | 7 | 14 |
| 2020 | 12 | 10 |
| 2021 | 8 | 9 |
| 2022 | 9 | 4 |
| 2023 | 8 | 5 |
| 2024 | 4 | 8 |
| 2025 | 9 | 12 |
| 2026 | 3 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Modular optical inspection station17 Mar 2026US 12,579,630 B2Instrumental, Inc.
- Apparatus and method for automatic monitoring of lids of beverage and food cans10 Mar 2026US 12,571,738 B2Quiss QualitäTs-Inspektionssysteme Und Service GmbH
- High contrast imaging in bonded sample metrology using oblique illumination20 Jan 2026US 12,529,878 B2KLA Corporation
- Optical inspection method and storage medium, and optical inspection apparatus that uses the same23 Sep 2025US 12,422,381 B2Kabushiki Kaisha Toshiba
- Optical sensing system and optical sensing method29 Jul 2025US 12,372,475 B2Pixart Imaging Inc.
- Coordinated motion metrology with circular scanning1 Oct 2026US 2026/0298840 A1Nanoverse Technologies Ltd
- Bright field-dark field metrology apparatus24 Sep 2026US 2026/0287515 A1Nanoverse Technologies Ltd
- Inspection device3 Sep 2026US 2026/0259036 A1Hitachi High-Tech Corporation
- Surface inspection systems and methods20 Aug 2026US 2026/0243669 A1The Boeing Company
- Combined laser sources for sample characterization13 Aug 2026US 2026/0235527 A1KLA Corporation
Most cited
By later US patents
- Methods and systems for determining a critical dimension and a thin film characteristic of a specimen248US 6,633,831 B2KLA-Tencor Technologies Corporation · 2003
- Sample inspection system235US 6,201,601 B1KLA-Tencor Corporation · 2001
- Surface inspection system188US 5,864,394 AKLA-Tencor Corporation · 1999
- Two-phase optical inspection method and apparatus for defect detection177US 5,699,447 AOrbot Instruments Ltd. · 1997
- Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection171US 5,822,055 AKLA Instruments Corporation · 1998