G01N 2021/8822
Dark field detection
Official title: {Dark field detection}
G01N2021/8822 (Dark field detection) appears on 480 US grants and 518 published applications in this corpus.
Search patents in G01N- Granted patents
- 480
- Published applications
- 518
- Assignees
- 231
- Inventors
- 1,026
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 5 | 0 |
| 1994 | 5 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 4 | 0 |
| 2000 | 5 | 0 |
| 2001 | 4 | 6 |
| 2002 | 6 | 21 |
| 2003 | 10 | 11 |
| 2004 | 12 | 21 |
| 2005 | 17 | 26 |
| 2006 | 19 | 27 |
| 2007 | 19 | 41 |
| 2008 | 24 | 21 |
| 2009 | 30 | 34 |
| 2010 | 36 | 21 |
| 2011 | 23 | 21 |
| 2012 | 18 | 20 |
| 2013 | 18 | 17 |
| 2014 | 14 | 14 |
| 2015 | 19 | 18 |
| 2016 | 14 | 18 |
| 2017 | 22 | 25 |
| 2018 | 16 | 18 |
| 2019 | 23 | 27 |
| 2020 | 24 | 17 |
| 2021 | 17 | 14 |
| 2022 | 15 | 12 |
| 2023 | 10 | 14 |
| 2024 | 10 | 13 |
| 2025 | 20 | 23 |
| 2026 | 7 | 18 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Inspection systems and methods employing directional light for enhanced imaging21 Apr 2026US 12,610,116 B2General Electric Company
- Method for manufacturing separator for electrical storage device14 Apr 2026US 12,601,691 B2Asahi Kasei Battery Separator Corporation
- High clarity gemstone facet and internal imaging analysis31 Mar 2026US 12,590,902 B2Gemological Institute of America, Inc. (GIA)
- Modular optical inspection station17 Mar 2026US 12,579,630 B2Instrumental, Inc.
- Pattern inspection apparatus and pattern inspection method inspecting a pattern using an image corrected using offset amount based upon dark noise levels17 Mar 2026US 12,579,635 B2NuFlare Technology, Inc.
- Dark field defect inspection system and inspection method thereof8 Oct 2026US 2026/0309637 A1Samsung Electronics Co., Ltd.
- Inspection system for edge and bevel inspection of semiconductor structures8 Oct 2026US 2026/0309638 A1Camtek Ltd.
- Coordinated motion metrology with circular scanning1 Oct 2026US 2026/0298840 A1Nanoverse Technologies Ltd
- Bright field-dark field metrology apparatus24 Sep 2026US 2026/0287515 A1Nanoverse Technologies Ltd
- Pattern inspection apparatus and pattern inspection method10 Sep 2026US 2026/0268478 A1NuFlare Technology, Inc.
Most cited
By later US patents
- Methods and systems for determining a critical dimension and a thin film characteristic of a specimen248US 6,633,831 B2KLA-Tencor Technologies Corporation · 2003
- Sample inspection system235US 6,201,601 B1KLA-Tencor Corporation · 2001
- Surface inspection system188US 5,864,394 AKLA-Tencor Corporation · 1999
- Two-phase optical inspection method and apparatus for defect detection177US 5,699,447 AOrbot Instruments Ltd. · 1997
- Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection171US 5,822,055 AKLA Instruments Corporation · 1998