Optical inspection method and storage medium, and optical inspection apparatus that uses the same

A computer-readable non-transitory storage medium storing an optical inspection program for causing a computer to execute:

• projecting first pattern light in a first basic modulation mode that periodically changes in bright and dark, onto an object;
• acquiring a first image by capturing an image of the object onto which the first pattern light has been projected;
• projecting second pattern light in a first inverted modulation mode in which bright and dark are inverted with respect to the first basic modulation mode, onto the object;
• acquiring a second image by capturing an image of the object onto which the second pattern light has been projected;
• and
• generating a singular light-scattered image in which a singular region including uniquely-scattered light that is extracted based at least on the first image and the second image is intensified.

An optical inspection apparatus including a processor including hardware that causes:

• a projector to project first pattern light in a first basic modulation mode that periodically changes in bright and dark, onto an object;
• an imaging apparatus to acquire a first image by capturing an image of the object onto which the first pattern light has been projected;
• the projector to project second pattern light in a first inverted modulation mode in which bright and dark are inverted with respect to the first basic modulation mode, onto the object;
• the imaging apparatus to acquire a second image by capturing an image of the object onto which the second pattern light has been projected;
• and
• to generate a singular light-scattered image in which a singular region including uniquely-scattered light that is extracted based at least on the first image and the second image is intensified.