G01K 5/486
Using microstructures
Official title: {using microstructures, e.g. made of silicon (G01K7/015, G01K7/028, G01K7/226, G01K17/006 take precedence)}
G01K5/486 (Using microstructures) appears on 16 US grants and 22 published applications in this corpus.
Search patents in G01K- Granted patents
- 16
- Published applications
- 22
- Assignees
- 18
- Inventors
- 48
- Latest grant
- 1 Jul 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 1 |
| 2006 | 1 | 0 |
| 2007 | 0 | 1 |
| 2008 | 0 | 1 |
| 2009 | 1 | 3 |
| 2010 | 0 | 0 |
| 2011 | 0 | 2 |
| 2012 | 0 | 0 |
| 2013 | 1 | 3 |
| 2014 | 3 | 1 |
| 2015 | 1 | 1 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 1 | 1 |
| 2019 | 0 | 3 |
| 2020 | 1 | 0 |
| 2021 | 1 | 1 |
| 2022 | 0 | 1 |
| 2023 | 2 | 1 |
| 2024 | 0 | 1 |
| 2025 | 1 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Temperature indicator1 Jul 2025US 12,345,574 B2ShockWatch, Inc.
- Time-temperature nanosensors for subsurface applications19 Sep 2023US 11,761,329 B2Saudi Arabian Oil Company
- MEMS structure and method for detecting a change in a parameter7 Feb 2023US 11,573,131 B2Infineon Technologies AG
- Sensing devices, sensors, and methods for monitoring environmental conditions18 May 2021US 11,011,323 B2BelluTech LLC
- Semiconductor workpiece temperature measurement system11 Aug 2020US 10,739,208 B2Varian Semiconductor Equipment Associates, Inc.
- Quantum sensor and method for fabricating the same2 Jul 2026US 2026/0185854 A1Electronics and Telecommunications Research Institute
- Sensing system19 Sep 2024US 2024/0312333 A1Rudders Rls Pty Ltd
- Time-temperature nanosensors for subsurface applications1 Jun 2023US 2023/0167735 A1Saudi Arabian Oil Company
- Temperature indicator27 Jan 2022US 2022/0026283 A1ShockWatch, Inc.
- Chip for gene sequencing and gene sequencing method5 Aug 2021US 2021/0237086 A1Beijing Boe Optoelectronics Technology Co., Ltd.
Most cited
By later US patents
- Method for monitoring and calibrating temperature in semiconductor processing chambers63US 7,572,052 B2APPLIED Materials.Inc. · 2009
- Transmission-type extrinsic fabry-perot interferometric optical fiber sensor27US 6,687,011 B1Korea Advanced Institute of Science and Technology · 2004
- Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods23US 5,917,226 ASTMicroelectronics S.r. l. · 1999
- Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging20US 7,089,786 B2Glaxo Group Limited · 2006
- Integrated mechanical device for electrical switching12US 8,692,247 B2STMicroelectronics (Rousset) SAS · 2014