MEMS structure and method for detecting a change in a parameter
AssigneeInfineon Technologies AG
InventorsReinhard Hainisch, Thomas Grille
Life of this patent
Estimating the term…
Abstract
A MEMS structure including a latch, a first lever, and a second lever. The first lever is designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place. The second lever is designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction.
Claims18
A MEMS structure, comprising:
- a latch;
- a first lever designed to move past the latch as a result of flexure in the event of a change in a parameter in a first direction, and to latch in place at the latch if a change in the parameter in a second direction different than the first direction subsequently takes place;
- a second lever designed to move past the first lever as a result of flexure in the event of the change in the parameter in the second direction, and to latch in place at the first lever if a change in the parameter in the first direction takes place after the change in the parameter in the second direction, and
- wherein the latch is formed as a separate element from the first level and from the second lever.
Dependencies are inferred from the claim text.