Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods

An integrated cantilever sensor for sensing temperature variations in a surrounding environment, the integrated sensor comprising:

• a switch detecting circuit region;
• and
• a sensor switching region connected to and positioned adjacent said switch detecting circuit region, said sensor switching region including:
• a fixed contact layer,
• remaining portions of a sacrificial layer positioned on portions of said fixed contact layer, and
• a floating contact layer on said remaining portions of the sacrificial layer and having portions thereof overlying said fixed contact layer in spaced relation therefrom in an open switch position and extending lengthwise generally transverse to the predetermined direction for defining a released cantilever beam, the spaced relation being formed by removal of unwanted portions of the sacrificial layer, said released cantilever beam having at least two layers of material, each of the at least two layers of material having a different thermal expansion coefficient so that said released cantilever beam displaces in the predetermined direction responsive to a temperature variation so as to contact said fixed contact layer and thereby form a closed switch position.

An integrated sensor for sensing temperature variations in a surrounding environment, the integrated sensor comprising:

• a switch detecting circuit region;
• and
• a sensor switching region connected to and positioned adjacent said switch detecting circuit region, said sensor switching region including:
• a fixed contact layer, and
• a floating contact having portions thereof directly overlying said fixed contact layer in spaced relation therefrom in an open switch position and extending lengthwise generally transverse to the predetermined direction, said floating contact having at least two layers of material, each of the at least two layers of material having a different thermal expansion coefficient so that said floating contact displaces in the predetermined direction responsive to a predetermined temperature variation so as to contact said fixed contact layer and thereby form a closed switch position.