G01J 3/443
Emission spectrometry
G01J3/443 (Emission spectrometry) appears on 558 US grants and 604 published applications in this corpus.
Search patents in G01J- Granted patents
- 558
- Published applications
- 604
- Assignees
- 359
- Inventors
- 1,339
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 3 | 0 |
| 1988 | 0 | 0 |
| 1989 | 3 | 0 |
| 1990 | 4 | 0 |
| 1991 | 2 | 0 |
| 1992 | 3 | 0 |
| 1993 | 0 | 0 |
| 1994 | 4 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 4 | 0 |
| 1999 | 4 | 0 |
| 2000 | 11 | 0 |
| 2001 | 14 | 0 |
| 2002 | 9 | 7 |
| 2003 | 7 | 11 |
| 2004 | 6 | 7 |
| 2005 | 8 | 8 |
| 2006 | 6 | 11 |
| 2007 | 8 | 13 |
| 2008 | 8 | 19 |
| 2009 | 6 | 13 |
| 2010 | 14 | 17 |
| 2011 | 4 | 12 |
| 2012 | 18 | 17 |
| 2013 | 13 | 24 |
| 2014 | 26 | 29 |
| 2015 | 19 | 36 |
| 2016 | 28 | 34 |
| 2017 | 36 | 38 |
| 2018 | 37 | 48 |
| 2019 | 42 | 37 |
| 2020 | 42 | 46 |
| 2021 | 30 | 44 |
| 2022 | 32 | 34 |
| 2023 | 20 | 27 |
| 2024 | 34 | 31 |
| 2025 | 30 | 20 |
| 2026 | 14 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Peak position measurement offset in a two-dimensional optical spectrum8 Sep 2026US 12,730,007 B2Thermo Fisher Scientific (Bremen) GmbH
- Variable transmission aperture1 Sep 2026US 12,723,914 B2Agilent Technologies, Inc.
- Data processing apparatus and method for imaging time series data of multiple wavelengths18 Aug 2026US 12,710,376 B2Tokyo Electron Limited
- Measuring device, measuring method, and vacuum processing apparatus21 Jul 2026US 12,689,013 B2Tokyo Electron Limited
- Ultra-miniature spatial heterodyne spectrometer14 Jul 2026US 12,680,870 B2California Institute of Technology
- Pulse windowing optical sensor8 Oct 2026US 2026/0309547 A1Tokyo Electron Limited
- Measuring device, measuring method, and vacuum processing apparatus8 Oct 2026US 2026/0311977 A1Tokyo Electron Limited
- Fire classification based flame detection1 Oct 2026US 2026/0298712 A1
- Methods and Fiber Optic Sensors For Measuring Temperature of High-Enthalpy Exhaust Plumes1 Oct 2026US 2026/0298721 A1Utah State University
- Optical sensor module having band-pass filter and process monitoring system having the same17 Sep 2026US 2026/0276446 A1Korea Institute of Machinery & Materials
Most cited
By later US patents
- Inductively coupled plasma spectrometer for process diagnostics and control435US 6,867,859 B1Lightwind Corporation · 2005
- Method and apparatus for monitoring plasma processing operations117US 6,077,386 ASandia Corporation · 2000
- Systems and methods for internal surface conditioning assessment in plasma processing equipment101US 9,966,240 B2APPLIED Materials.Inc. · 2018
- Method and combustor apparatus for sensing the level of a contaminant within a combustion flame94US 6,268,913 B1Siemens Westinghouse Power Corporation · 2001
- Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication85US 5,347,460 AInternational Business Machines Corporation · 1994