Optical sensor module having band-pass filter and process monitoring system having the same

An optical sensor module comprising:

• a module receiving part configured to form a receiving space, an incident portion into which a light is incident being formed in a first side surface of the module receiving part;
• a splitter part disposed in the receiving space, and having at least one splitter configured to split an incident light;
• an optical detecting part having optical detectors disposed at a second side surface and a third side surface, the second side surface facing the first side surface, the third side surface being adjacent to the first side surface;
• and
• a transmission filter part disposed between the splitter and the optical detector, and having transmission filters having inclined angles different from each other with respect to the optical detector.

An optical sensor module comprising:

• a module receiving part configured to form a receiving space, an incident portion into which a light is incident being formed in a first side surface of the module receiving part;
• a splitter part disposed in the receiving space, and having at least one splitter configured to split an incident light;
• a transmission filter part having at least two transmission filters arranged along a direction perpendicular to a direction of the incident light, the transmission filters being configured to transmit predetermined signals of different bands;
• and
• an optical detecting part having at least two optical detectors respectively arranged with the transmission filters, the optical detectors being configured to detect a light passing through the transmission filters.