Data processing apparatus and method for imaging time series data of multiple wavelengths
AssigneeTokyo Electron Limited
InventorsHitoshi Yonemichi, Hisanori Sakai, Takeshi Akimoto
Life of this patent
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Abstract
A data processing apparatus comprises processing circuitry configured to generate normalized data by normalizing time series data of multiple wavelengths, measured from a substrate, by using predetermined reference data; divide the normalized data into a plurality of regions for each predetermined time range and predetermined wavelength range; for each respective region of the plurality of regions, extract an outlier value in the respective region as a representative value; and convert the representative values from the plurality of regions into color data to generate image data from the color data.
Claims17
A data processing apparatus, comprising:
- processing circuitry configured to
- generate normalized data by normalizing time series data of multiple wavelengths, measured from a substrate, by using predetermined reference data;
- divide the normalized data into a plurality of regions for each predetermined time range and predetermined wavelength range;
- for each respective region of the plurality of regions;
- calculate an average value of the normalized data included in the respective region;
- and
- extract an outlier value, from the normalized data included in the respective region, that has a largest difference from the average value as a representative value for the respective region;
- and
- convert the representative values from the plurality of regions into color data to generate image data from the color data.
A data processing method, comprising:
- generating normalized data by normalizing time series data of multiple wavelengths, measured from a substrate, by using predetermined reference data;
- dividing the normalized data into a plurality of regions for each predetermined time range and predetermined wavelength range;
- for each respective region of the plurality of regions:
- calculating an average value of the normalized data included in the respective region;
- and
- extracting an outlier value, from the normalized data included in the respective region, that has a largest difference from the average value as a representative value for the respective region;
- and
- converting the representative values from the plurality of regions into color data to generate image data from the color data.
A non-transitory computer readable medium storing computer executable instructions which, when executed by processing circuitry, cause the processing circuitry to:
- generate normalized data by normalizing time series data of multiple wavelengths, measured from a substrate, by using predetermined reference data;
- divide the normalized data into a plurality of regions for each predetermined time range and predetermined wavelength range;
- for each respective region of the plurality of regions:
- calculate an average value of the normalized data included in the respective region;
- and
- extract an outlier value, from the normalized data included in the respective region, that has a largest difference from the average value as a representative value for the respective region;
- and
- convert the representative values from the plurality of regions into color data to generate image data from the color data.
Dependencies are inferred from the claim text.