G01F 1/844
Microfluidic or miniaturised flowmeters
Official title: {microfluidic or miniaturised flowmeters}
G01F1/844 (Microfluidic or miniaturised flowmeters) appears on 56 US grants and 58 published applications in this corpus.
Search patents in G01F- Granted patents
- 56
- Published applications
- 58
- Assignees
- 22
- Inventors
- 88
- Latest grant
- 25 Feb 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 2 |
| 2003 | 5 | 4 |
| 2004 | 1 | 2 |
| 2005 | 2 | 4 |
| 2006 | 3 | 6 |
| 2007 | 3 | 3 |
| 2008 | 3 | 5 |
| 2009 | 5 | 7 |
| 2010 | 2 | 3 |
| 2011 | 6 | 1 |
| 2012 | 2 | 3 |
| 2013 | 4 | 1 |
| 2014 | 1 | 1 |
| 2015 | 1 | 1 |
| 2016 | 0 | 2 |
| 2017 | 1 | 1 |
| 2018 | 1 | 1 |
| 2019 | 0 | 2 |
| 2020 | 3 | 1 |
| 2021 | 1 | 4 |
| 2022 | 1 | 3 |
| 2023 | 1 | 0 |
| 2024 | 2 | 1 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel25 Feb 2025US 12,234,143 B2Berkin B.V.
- Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid30 Apr 2024US 11,971,284 B2STMicroelectronics S,r.l.
- MEMS-based Coriolis mass flow controller2 Jan 2024US 11,860,016 B2Lam Research Corporation
- MEMS coriolis gas flow controller30 May 2023US 11,662,237 B2Lam Research Corporation
- Vibratory measuring device having a measuring tube18 Jan 2022US 11,226,222 B2Endress + Hauser Flowtec AG
- Device for controlling or measuring a fluid1 Aug 2024US 2024/0255331 A1Berkin B.V.
- Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel13 Oct 2022US 2022/0324701 A1Berkin B.V.
- Measurement tube of a coriolis sensing element, coriolis sensing element, and coriolis meter15 Sep 2022US 2022/0291031 A1Endress + Hauser Flowtec AG
- Micro-coriolis mass flow sensor with strain measurement devices7 Apr 2022US 2022/0107215 A1
- Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid23 Sep 2021US 2021/0293597 A1STMicroelectronics S,r.l.
Most cited
By later US patents
- Micromachined fluidic apparatus219US 6,477,901 B1Integrated Sensing Systems, Inc. · 2002
- Fluid delivery system and method130US 6,932,114 B2Integrated Sensing Systems, Inc. · 2005
- Methods and apparatus for measuring and dispensing processing solutions to a CMP machine57US 5,857,893 ASpeedfam Corporation · 1999
- Integrated microtube sensing device55US 6,647,778 B2Integrated Sensing Systems, Inc. · 2003
- Single path radial mode Coriolis mass flow rate meter48US 5,373,745 ADirect Measurement Corporation · 1994