MEMS coriolis gas flow controller
AssigneeLam Research Corporation
InventorsIqbal A. Shareef, Dennis Smith, John E. Daugherty
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Abstract
A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.
Claims17
A fluid delivery system comprising:
- N first valves, wherein inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero;
- and
- N mass flow controllers, each comprising:
- a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves;
- a second valve having an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber;
- and
- a controller in communication with the MEMS Coriolis flow sensor and configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor,
- wherein the MEMS Coriolis flow sensor of at least one of the N mass flow controllers further includes an accelerometer.
Dependencies are inferred from the claim text.