Micro-coriolis mass flow sensor with strain measurement devices
OwnerJarno GROENESTEIJN, Joost Conrad LÖTTERS +2inventors
InventorsJarno GROENESTEIJN, Joost Conrad LÖTTERS, Thomas Victor Paul SCHUT, Remco John WIEGERINK
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Abstract
The invention relates to a micro-Coriolis mass flow sensor, comprising a Coriolis tube having a fixed inlet and a fixed outlet, being fixed in tube fixation means, excitation means for oscillating the Coriolis tube about an excitation axis, detection means (8) for detecting, in use, at least a measure for movements of part of the Coriolis tube, characterized by the detection means (8) comprising one or more strain measurement devices (9, 11) configured for resistive readout being arranged in or on the Coriolis tube.
Claims18
-13. (canceled)
A Micro-Coriolis mass flow sensor (1) comprising a Coriolis tube (2) having a fixed inlet (3) and a fixed outlet (4), being fixed in tube fixation means (5), excitation means for oscillating the Coriolis tube about an excitation axis (6, 7), detection means (8) for detecting, in use, at least a measure for movements of part of the Coriolis tube, wherein the detection means (8) comprising one or more strain measurement devices (9) configured for resistive readout being arranged in or on the Coriolis tube.
Dependencies are inferred from the claim text.