Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid

A Coriolis-force-based flow sensing device, comprising:

• a silicon substrate;
• an insulating layer on a surface of the substrate;
• at least one driving electrode on the insulating layer;
• and
• a silicon structural body partially overlapping the driving electrode, the structural body having a buried channel.

A system for measuring a property of a fluid, comprising:

• a Coriolis-force-based flow sensing device that includes:
• a substrate;
• an insulating layer on a surface of the substrate;
• at least one driving electrode on the insulating layer,
• a structural body partially overlapping the driving electrode, the structural body having a buried channel, the driving electrode and the structural body are coupled together to generate an electrostatic force can, during use, to vibrate the structural body;
• and
• a fluid-input port and a fluid-output port in fluid communication with the buried cavity;
• a fluid-recirculating device fluidically connected to the fluid-input port and the fluid-output port, the fluid recirculating device configured to cause a fluid to flow through the buried channel;
• driving circuitry configured to bias the driving electrode with respect to the structural body to vibrate the structural body when the fluid flows through the buried channel;
• and
• a sensor configured to sense a vibration of the structural body.