G01F 1/6845
Micromachined devices
Official title: {Micromachined devices}
G01F1/6845 (Micromachined devices) appears on 661 US grants and 569 published applications in this corpus.
Search patents in G01F- Granted patents
- 661
- Published applications
- 569
- Assignees
- 216
- Inventors
- 1,040
- Latest grant
- 16 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 4 | 0 |
| 1985 | 5 | 0 |
| 1986 | 6 | 0 |
| 1987 | 8 | 0 |
| 1988 | 9 | 0 |
| 1989 | 11 | 0 |
| 1990 | 11 | 0 |
| 1991 | 6 | 0 |
| 1992 | 3 | 0 |
| 1993 | 7 | 0 |
| 1994 | 7 | 0 |
| 1995 | 13 | 0 |
| 1996 | 5 | 0 |
| 1997 | 12 | 0 |
| 1998 | 15 | 0 |
| 1999 | 7 | 0 |
| 2000 | 11 | 0 |
| 2001 | 17 | 4 |
| 2002 | 18 | 24 |
| 2003 | 28 | 23 |
| 2004 | 30 | 32 |
| 2005 | 25 | 32 |
| 2006 | 19 | 24 |
| 2007 | 26 | 31 |
| 2008 | 18 | 28 |
| 2009 | 23 | 23 |
| 2010 | 26 | 22 |
| 2011 | 18 | 15 |
| 2012 | 16 | 21 |
| 2013 | 13 | 24 |
| 2014 | 18 | 25 |
| 2015 | 20 | 37 |
| 2016 | 12 | 19 |
| 2017 | 31 | 23 |
| 2018 | 24 | 21 |
| 2019 | 24 | 21 |
| 2020 | 20 | 21 |
| 2021 | 16 | 25 |
| 2022 | 22 | 27 |
| 2023 | 17 | 15 |
| 2024 | 22 | 14 |
| 2025 | 11 | 11 |
| 2026 | 5 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus and method of measuring air currents on surface of substrate16 Jun 2026US 12,660,576 B2Semes Co., Ltd.
- Method and device for determining a flow rate28 Apr 2026US 12,613,175 B2Sensirion AG
- Omnidirectional flow sensor17 Feb 2026US 12,553,754 B2The Trustees of Princeton University
- Thermal fluid flow sensor27 Jan 2026US 12,535,348 B2Flusso Limited
- Thermopile-based flow sensing apparatus with electrostatic protection20 Jan 2026US 12,529,585 B2Honeywell International Inc.
- Method for determining a flow rate of a fluid independent of the thermal properties of the fluid8 Oct 2026US 2026/0309527 A1Berkin B.V.
- Wireless fluid sensor for inline liquid sensing in medical systems21 May 2026US 2026/0137863 A1Analog Devices, Inc.
- Flow sensor on glass and insert molded into fittings21 May 2026US 2026/0139984 A1Analog Devices, Inc.
- Portable spirometer2 Apr 2026US 2026/0090726 A1Healthup SpóLka Akcyjna
- Sensor12 Mar 2026US 2026/0071902 A1Kabushiki Kaisha Toshiba
Most cited
By later US patents
- Flow sensor243US 4,478,077 AHoneywell Inc. · 1984
- Flow sensor235US 4,478,076 AHoneywell Inc. · 1984
- Semiconductor device219US 4,651,564 AHoneywell Inc. · 1987
- Flow sensor195US 4,501,144 AHoneywell Inc. · 1985
- Backside contact of sensor microstructures152US 5,511,428 AMassachusetts Institute of Technology · 1996