Flow sensor on glass and insert molded into fittings
AssigneeAnalog Devices, Inc.
InventorDavid Frank Bolognia
Life of this patent
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Abstract
A flow sensor for fluid delivery monitoring and control includes at least two substrates, a flow channel formed between the at least two substrates, a through glass vias (TGV) extending through at least a portion of at least one of the two substrates, one or more sensing elements along the flow channel, and a chip mounted to at least one of the two substrates. The chip and the one or more sensing elements are in electrical communication via the through glass vias (TGV).
Claims32
A flow sensor glass sub-assembly comprising:
- at least two substrates stacked on each other;
- a flow channel formed between the at least two substrates;
- a through substrate vias extending through at least a portion of at least one of the two substrates;
- one or more sensing elements along the flow channel;
- and
- a chip mounted to at least one of the two substrates;
- wherein the chip and the one or more sensing elements are in electrical communication via the through substrate vias.
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A fitting assembly for fluid delivery, the fitting assembly comprising:
- a fitting comprising a proximal end, a distal end, and a flow path extending from the proximal end to the distal end;
- a flow sensor positioned along the flow path and configured to detect a fluid flow along the flow path;
- wherein the flow sensor is molded into the fitting.
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Dependencies are inferred from the claim text.